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Junction Technology Group - Proceedings

December 2008
Topic: Implant Safety: "Hands-off" Cleans & Conditioning, Toxic Ions, Radiation

Safety and Tool Contamination Issues When Using Indium Trichloride for Indium Implants in Varian E500 Implanters (42K pdf)
- Danny Rosenblatt, Maxim

High-energy B, neutrons and molecular toxics (1.2MB pdf)
- Michael Current, Current Scientific

XeF2 cleaning methods for dopants (4.9MB pdf)
- Jim Mayer, ATMI

Update on Krytek source conditioning and storage (1MB pdf)
- Burt Allen, Core Systems

Operational considerations for "strange" ions
- Chuck Hudak, Core Systems

H-implant radiation safety issues
- Ron Eddy/John Schuur, Innovion

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